Advances in Rapid Thermal and Integrated Processing

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are co...

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Corporate Author: SpringerLink (Online service)
Other Authors: Roozeboom, Fred. (Editor)
Format: SpringerLink eBooks
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 1996.
Series:NATO ASI Series, Series E: Applied Sciences, 318
Online Access:


3rd Floor Main Library

Call Number: A1234.567
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