Advances in Rapid Thermal and Integrated Processing
Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are co...
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| Format: | SpringerLink eBooks |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
1996.
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| Series: | NATO ASI Series, Series E: Applied Sciences,
318 |
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| Online Access: | http://dx.doi.org/10.1007/978-94-015-8711-2 |
Internet
http://dx.doi.org/10.1007/978-94-015-8711-23rd Floor Main Library
| Call Number: |
A1234.567 |
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| Copy 1 | Available |